Methods in micro- and nanofabrication
DTU National Centre for Nano Fabrication and Characterizatio
The overall aim of the course is to provide you with theoretical background and hands-on experience in the most common experimental techniques used for Silicon microfabrication. You will be introduced to microfabrication methods such as photolithography, etching, thin film deposition and characterization techniques such as SEM and profilometry. This should enable you to design a fabrication process, draw a lithographic mask and safely work in the DTU Nanolab cleanroom.
Learning objectives:
A student who has met the objectives of the course will be able to:
- Work safely, cleanly, politely, and independently in the DTU Nanolab cleanroom
- Explain instrument physics and chemistry to specialists and generalists
- Explain technical and fundamental limitations for a given fabrication process
- Calculate relevant process parameters
- Analyze and apply process results
- Design photomasks
- Design and fabricate a simple microelectromechanical system (MEMS)
- Present and discuss a process flow and fabrication results
- Critically select process and characterization instruments for own process
Contents:
The course has a theoretical part, a methods part and an applied part. In the theoretical part, the physics, chemistry, and technology of the fabrication processes used in modern micro- and nanofabrication is described. Some of the subjects covered are: UV Lithography, Reactive Ion Etch (RIE), Lift off, Chemical Vapor Deposition (CVD), Plasma Enhanced CVD, Physical Vapor Deposition (PVD), Silicon and Silica as substrate materials, material modification by ion-implant and doping-diffusion, annealing, bonding: anodic bonding, fusion bonding, process integration, process simulation, and characterization. The methods part consists of 5 TPTs (Tool Package Trainings) containing hands-on instructions 1. Cleanroom safety 2. Lithography 3. Mask design 4. Scanning electron microscopy (SEM) 5. Plasma etching In the applied part of the course, the students will A) follow a guided experimental part focusing on the fabrication of a pressure sensor in the DTU Nanolab cleanroom or B) acquire specialized knowledge in a selected topic of advanced micro- or nanofabrication. In both cases, the results will be presented to the other participants at the end of the course.